Canon ANELVA (ANalysis ELectronics VAcuum) is a fully owned subsidiary of
Canon Inc. that manufactures thin film vacuum processing equipment for semiconductor, data storage, and the display industry.
Canon ANELVA started developing PVD tool for spintronics back in1997, and since then the company's equipment has evolved to accommodate advancements in read head technologies - from GMR to TMR to low-RA TMR. Leveraging its expertise in magnetic thin films, Canon ANELVA started developing PVD and etch equipment for MRAM devices in 2000.
Canon ANELVA collaborates with over 20 R&D centers and device manufactures on 200- and 300-mm wafer-compliant PVD (sputtering), IBE, and RIE equipment for MRAM manufacturing.
5-1 Kurigi 2-chome, Asao-ku,
Kawasaki-shi, Kanagawa
215-8550
Japan
